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Introduction to Scanning Electron Microscopy
Course Objectives
• Learn the structure and the operating modes of the Scanning Electron Microscope.
• Learn the morphological, structural and analytical performance of the SEM.
• Understanding SEM potentialities in material science.
Course Description
Sequential image formation and its peculiarity. Image formation with electrons.
Description of the main electron optical elements of the microscope: electron sources, electron lenses, their characteristics and their effects on the electron probe formation.
Beam-specimen interaction and resulting signals: Secondary Electrons (SE), Backscattered Electrons (BSE) , X ray, Transmitted Electrons (TE) in thin specimens ( for Scanning Transmission Electron Microscopy).
Main detectors for SE, BSE, X-ray and TE.
Image resolution and image contrast in the different operating modes.
Depth of focus. Analytical performance.
Low pressure or environmental SEM.
Course Materials
Lectures notes and reprints.
Instructor: Pier Giorgio Merli
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Pier Giorgio Merli is research director at CNR-IMM, Sezione di Bologna ( formerly Istituto LAMEL). He took up his scientific career at Istituto LAMEL in 1970. An important part of his research activity has been involved in microstructural and microanalytical characterization of semiconductors and electron devices. Transmission Electron Microscopy as well as Scanning Electron Microscopy methods have been widely investigated.
He is honorary member of Italian Society of Electron Microscopy, author of more than 100 publications on international magazines and proceedings of international conferences, organizer and director of international schools on electron microscopy in materials science (1985, 1991 and 2001) and editor of the respective proceedings. He has been chairman as well as invited lecturer at international conferences and referee for electron microscopy magazines.
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Questions? Merli@bo.imm.cnr.it
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