Auger Electron Spectroscopy and Depth Profiling

Course Objectives

Auger Electron Spectroscopy (AES) is used to determine surface composition. Depth profiling is used to determine the composition as a function of depth.

•  Learn the principles of AES and approaches for depth profiling
• Learn how data is acquired and analysed
• Discussion of instrumentation and recent developments
• See examples of AES and depth profiling for solving problems

Course Description

This half-day course describes the use of AES for analysing the composition of solid surfaces and for measuring the composition with depth from the original surface. The course will start with the principles of the technique and the reasons for its surface sensitivity.

The methods used to acquire and display spectra in various instruments will be discussed. This will be followed by a discussion of qualitative and quantitative analysis and problems to be aware of with an analysis. Recent approaches for improved quantitative analysis will be discussed.

For depth profiling, both nondestructive and destructive methods will be discussed, including the advantages and limitations of each. Powerful data processing procedures to improve signal-to-noise, to separate different chemical states of an element, and to eliminate problems due to peak overlap will also be presented.

Many examples will be given to illustrate the applications of AES and depth profiling to solve problems.

Who Should Attend?

Those entering the field of Auger Electron Spectroscopy or depth profiling will find the course particularly valuable. Those using the techniques will also find it valuable, both as a refresher course and to learn about new developments. Scientists, engineers, technicians, and students are all welcome.

Course Materials:
Course Notes

Instructor: John T. Grant, University of Dayton, Dayton, Ohio, USA.

Short Curriculum

John Grant took his first Auger spectrum in 1968. He has been active in the field ever since, and teaches courses in surface analysis on a regular basis. He received his Ph.D. in physics from the University of New South Wales, Australia. He served as Chairman of the American Society for Testing and Materials Subcommittee on Auger Electron Spectroscopy from1980 to1993, is North American Editor of Surface and Interface An aly sis , and in 2003 edited a book with Dave Briggs on Surface Analysis by Auger and X-ray Photoelectron Spectroscopy .

Questions?: j.grant@ieee.org