Surface Analysis and Materials Characterization


Nanotribology and Nanomechanics and Applications to MEMS/NEMS

I. Principles of Nanotribology and Nanomechanics

A. Introduction to Tribology
- Overview of Surface Roughness, Friction, Interface Temperatures, Wear, and Lubrication

B. Micro/Nanotribology and Material Characterization Studies Using Atomic/Friction Force Microscopy
-  Overview of Friction, Lubrication, Scratching, Wear and Indentation/Localized Deformation

II. Adhesion and Stiction

•  Introduction
•  Mechanisms of Solid-Solid Adhesion
•  Mechanisms of Liquid Mediated Contact
•  Adhesion Measurement Techniques
•  Lubrication Approaches and Typical Stiction Data
•  Examples of Methods to Reduce Adhesion and Stiction in Magnetic Storage Devices and MEMS/NEMS

III. Applications to MEMS/NEMS

- Introduction

- Current Status of Micro/Nanodevices in the Market Place
- Tribological Issues in MEMS/NEMS
- Importance of Mechanics of Nanostructures

- Micro/Nanotribological Studies of MEMS Materials and Lubricants for MEMS/NEMS
- Component Level Studies
- Mechanics of Nanostructures
- Directions and the Future of MEMS and Nanodevices

Instructors: Bharat Bhushan
(Ohio Eminent Scholar and The Howard D. Winbigler Professor - Director, Nanotribology Laboratory for Information Storage and MEMS/NEMS, The Ohio State University, 206 W. 18 th Avenue, Columbus, Ohio 43210-1107 USA)

Short curriculum
Prof.Bharat Brushan

Dr. Bharat Bhushan received an M.S. in mechanical engineering from the Massachusetts Institute of Technology in 1971, an M.S. in mechanics and a Ph.D. in mechanical engineering from the University of Colorado at Boulder in 1973 and 1976, respectively, an MBA from Rensselaer Polytechnic Institute at Troy, NY in 1980, Doctor Technicae from the University of Trondheim at Trondheim, Norway in 1990, a Doctor of Technical Sciences from the Warsaw University of Technology at Warsaw, Poland in 1996, and Doctor Honouris Causa from the Metal-Polymer Research Institute of National Academy of Sciences at Gomel, Belarus in 2000. He is a registered professional engineer (mechanical). He is presently an Ohio Eminent Scholar and The Howard D. Winbigler Professor in the Department of Mechanical Engineering, Graduate Research Faculty Advisor in the Department of Materials Science and Engineering, and the Director of the Nanotribology Laboratory for Information Storage & MEMS/NEMS (NLIM) at the Ohio State University, Columbus, Ohio. He is an internationally recognized expert of tribology on the macro- to nanoscales, and is one of the most prolific authors. He is considered by some a pioneer of the tribology and mechanics of magnetic storage devices and a leading researcher in the fields of nanotribology and nanomechanics using scanning probe microscopy and applications to micro/nanotechnology.

He has authored 5 technical books, 45 handbook chapters, more than 450 technical papers in referred journals, and more than 60 technical reports, edited more than 25 books, and holds 14 U.S. patents.He is founding editor-in-chief of World Scientific Advances in Information Storage Systems Series, CRC Press Mechanics and Materials Science Series, and Microsystem Technologies Micro- & Nanosystems and Information Storage & Processing Systems (formerly called Journal of Information Storage and Processing Systems). He has given more than 250 invited presentations on five continents and more than 60 keynote/plenary addresses at major international conferences.
Dr. Bhushan is an accomplished organizer. He organized the first symposium on Tribology and Mechanics of Magnetic Storage Systems in 1984 and the first international symposium on Advances in Information Storage Systems in 1990, both of which are now held annually. He is the founder of an ASME Information Storage and Processing Systems Division founded in 1993 and served as the founding chair during 1993-1998. His biography has been listed in over two dozen Who's Who books including Who's Who in the World and has received more than a dozen awards for his contributions to science and technology from professional societies, industry, and U.S. government agencies. He is also the recipient of various international fellowships including the Alexander von Humboldt Research Prize for Senior Scientists, Max Planck Foundation Research Award for Outstanding Foreign Scientists, and the Fulbright Senior Scholar Award. He is a foreign member of the International Academy of Engineering (Russia), Byelorussian Academy of Engineering and Technology and the Academy of Triboengineering of Ukraine, an honorary member of the Society of Tribologists of Belarus, a fellow of ASME, IEEE, and the New York Academy of Sciences, and a member of STLE, ASEE, Sigma Xi and Tau Beta Pi.
Dr. Bhushan has previously worked for the R & D Division of Mechanical Technology Inc., Latham, NY; the Technology Services Division of SKF Industries Inc., King of Prussia, PA; the General Products Division Laboratory of IBM Corporation, Tucson, AZ; and the Almaden Research Center of IBM Corporation, San Jose, CA.