Materials, Thin Films and Coatings: Processing and Properties

Degassing of vacuum materials and its reduction

Course Objectives
• Understand fundamentals of thermal and stimulated degassing of materials used in vacuum technology (metals and organics).
• Learn how to measure and decrease their degassing.
• Learn about non-evaporable getter coatings as the ultimate solution to degassing problems.

Course Description

The information provided by this course should allow the attendees to make the appropriate choice of materials and treatments to minimize the degassing rate of a vacuum apparatus.
The thermal outgassing mechanisms of the most currently used metals (stainless steel, copper, aluminium alloys, etc…) and polymers (elastomers, thermoplastics, etc…), as well as the mechanisms of electron, ion, and synchrotron light stimulated degassing will be discussed in detail.
The different methods for measuring degassing rates will be reviewed and their artefacts and limitations underlined. The peculiar features of the degassing measurement of polymers will be discussed.
The traditional treatments for reducing the material degassing, i.e. surface chemical cleaning, air and vacuum firing, in situ bake-out, and glow discharge will be described.
Finally, the benefits of the recently introduced non-evaporable getter coatings will be highlighted with emphasis on large scale production and integration in traditional vacuum systems.


Who should attend?
Technicians, engineers, and scientists concerned with the production of high- and ultrahigh- vacuum. A basic knowledge of vacuum technology is required.

Instructors: Paolo Chiggiato, EST division, CERN

Course Materials: Copies of the course transparencies.

Short curriculum
Paolo Chiggiato received his degree in nuclear engineering from Politecnico di Milano in 1990. The subject of his thesis, carried out at the European Organization for Nuclear Research (CERN), was the study of NEG pump performances in particle accelerators and XHV systems. Following a 2 years fellowship appointment at CERN, he obtained in 1992 a staff position at the same organization where he is currently the leader of the “degassing treatment and analysis” section. His primary activities focus on thin films development and production for vacuum applications, outgassing measurements of metals and polymers, XHV pressure measurement, surface and thermal treatments characterization by thermal desorption spectroscopy, electron and photon stimulated desorption. He leads the vacuum firing activity at CERN making use of a unique world-wide facility for the treatment of large vacuum components.

Questions?
- chiggiato@cern.ch