| Elements of
micro and nanofabrication
Course Objectives
• Introduction to micro and nanofabrication techniques.
• Interactions between electrons/ions and matter.
• Interaction of X-ray radiation with matter.
• Alternative lithography and relation between top-down
and bottom –p approaches
• Course Description
Short Description
The 4-6 hour course will be an introduction to micro
and nanofabrication technique, tools and ideas.
We will review some of the most traditional techniques with
a glance to new lithographic techniques such as nano imprinting
lithography and 2 photon lithography. Some attention will be
given to the instrumentation necessary to micro and nanofabrication.
The course will present some relevant application of nano and
microstructures as devices, including aspect of interest in
basic research.
Who Should Attend?
The course is particularly designed for non specialists
and PhD students. Moreover, it can be considered as introductory
for scientist from other research fields.
Course Materials: A CD with the lectures will be released
Instructors: Dr. Di Fabrizio
| Short curriculum |
|
Enzo Di Fabrizio is a research director of the LILIT (Laboratory for Interdisciplinary LITography) group (about 25 researchers) of INFM (National Institute for Matter Physics) and responsible for the area of micro&nanotecnology at the Synchrothron facility Elettra located in Trieste-Italy. His activity on micro and nanotechnology started more than 13 years ago and includes 5 years at University of Madison and at the excellence center for X-ray lithography (CXrL) in Madison Wisconsin US. He published about 150 papers on international Journals.
Moreover, Enzo di Fabrizio is in charge of other scientific and management actvity such as:
-
division Leader of NNL (National Nanotechnology Laboratory);
-
responsible for the research activity E4 (micro and nano lithography) of the laboratory national Laboratory TASC;
- responsible of the national network "Nanoscience";
- coordinator of the INFM national project "Nanotechnology";
- member of the leading board of INFM;
-
member of the leading board of Applied Network and technology transfer of INFM
- member of review committee of the European Synchrotron ESRF in Grenoble (Fr) |
Questions?: difabrizio@tasc.infm.it
|
